MEMS - Design and Fabrication by Mohamed Gad-el-Hak

By Mohamed Gad-el-Hak

Show description

Read or Download MEMS - Design and Fabrication PDF

Best automotive books

Europe's Automotive Industry on the Move: Competitiveness in a Changing World, Vol.32

The car is an important pillar of the fashionable worldwide economic climate and considered one of Europe's key industries. There can infrequently be any doubt concerning the vital position of this region as an engine for employment, progress and innovation in Europe, and there are the most important demanding situations and possibilities forward. The authors make clear a large diversity of matters — globalisation and restructuring, alternate and overseas direct funding, innovation, law, and coverage — and placed a distinct concentrate on the recent member states.

Illustrated Encyclopedia of Extraordinary Automobiles

This chunky structure, retro-feel encyclopedia stories a hundred and fifty of the main great autos in motoring heritage from the earliest to experiments for the longer term. every one vehicle is illustrated and followed via informative textual content, a colourful quote, and a requisites field. allotted generously during the ebook are pleasant photographic spreads displaying automobiles which are ordinary in their period.

Motor City muscle: the high-powered history of the American musclecar

This can be the high-performance story of what was once definitely the quickest, loosest period in car background. throughout the Nineteen Sixties and into the Seventies, America’s carmakers fought an unbridled warfare for highway supremacy. the soldiers ranged from gentle and agile Z/28 Camaros and Boss 302 Mustangs to big-block brutes just like the 440 street Runner and level I 455 Buick GS.

Additional info for MEMS - Design and Fabrication

Sample text

1996) “Low Strain Sputtered Polysilicon for Micromechanical Structures,” in Proc. 9th Int. Workshop on Microelectromechanical Systems, 11–15 February, San Diego, pp. 258–62. C. , McGraw-Hill, New York, pp. 93–129. , and Komvopoulos, K. (1992) “The Effect of Release Etch Processing on Surface Microstructure Stiction,” in Technical Digest: Solid-State Sensor and Actuator Workshop, 4–8 June, Hilton Head, SC, pp. 202–7. W. (1994) “Porous Polycrystalline Silicon: A New Material for MEMS,” J. MEMS 3, pp.

This process, commonly known as LIGA, has been used to produce highaspect-ratio structures such as microgears from NiFe magnetic alloys [Leith and Schwartz, 1999]. , 1999]. In this application, Ni was selected for its desirable chemical, wear, and temperature properties, not its magnetic properties. 8 Silicon Carbide Use of Si as a mechanical and electrical material has enabled the development of MEMS for a wide range of applications. Of course, use of MEMS is restricted by the physical properties of the material, which in the case of Si-based MEMS limits the devices to operating temperatures of about 200°C in low-wear and benign chemical environments.

Of course, use of MEMS is restricted by the physical properties of the material, which in the case of Si-based MEMS limits the devices to operating temperatures of about 200°C in low-wear and benign chemical environments. Therefore, alternate materials are necessary to extend the usefulness of MEMS to areas classified as harsh environments. In a broad sense, harsh environments include all conditions where use of Si is prohibited by its electrical, mechanical, and chemical properties. These would include high-temperature, high-radiation, high-wear, and highly acidic and basic chemical environments.

Download PDF sample

Rated 4.13 of 5 – based on 31 votes