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P. fr Keywords: inertial sensors, accelerometers, gyroscopes, market forecast, deep etching 49 The Assessment of the Socio-economic Impact of the Introduction of Intelligent Safety Systems in Road Vehicles – Findings of the EU Funded Project SEiSS S. Krüger, J. Abele, C. Kerlen, VDI/VDE-IT H. Baum, T. Geißler, W. H. Schulz, University of Cologne Abstract Road crashes take a tremendous human and societal toll from all EU member states. 000 people are killed and millions more are injured, many of them permanently.
By keeping a conservative scenario (in 2007, the use of Deep RIE will remain at 80% of the total production), we estimate that almost 50 Deep RIE equipments will be necessary in 2007. For gyroscopes, the production yield is in the range of 50% today. We estimate that 52% of gyros are silicon or quartz surface micromachined. 48% are bulk micromachined (for example, SSS is using Deep RIE equipments) but some other players are using Deep RIE equipments in surface micromachining process in order to take benefit from the high etching rate.
Geißler, W. H. Schulz, University of Cologne Abstract Road crashes take a tremendous human and societal toll from all EU member states. 000 people are killed and millions more are injured, many of them permanently. The costs of the road safety problem in the EU amount up to 2% of its gross domestic product. New, safety related technologies are promising instruments in order to reduce the number of accidents and their severity. The study delivers an overview of safety-related functions, identifies key variables and developes methods for the assessment of their socio-economic impact.